DowDuPont introduces Kalrez for semiconductors

DowDuPont Transportation and Advanced Polymers has introduced DuPont Kalrez 9600, a perfluoroelastomer developed for the semiconductor fabricating industry.

DowDuPont is promoting Kalrez as a high-purity product that provides longer seal life; is ozone, ammonia, fluorine and oxygen radical resistant, and has ultralow outgassing and outstanding thermal stability.

The company said Kalrez is suited for plasma deposition applications and for the etch processes used to fabricate chips in the semiconductor industry.